Standard Specification for clean room
International standards and specifications
(1) Iso14644-1 classification of air cleanliness
(2) ISO14644-2 is a technical requirement for testing and monitoring the continuous compliance of iso14644-1
(3) Iso14644-3 test method
(4) Iso14644-4 start of design and construction
(5) Iso14644-5 operations
(6) Iso14644-6 terms and definitions
(7) Iso14644-7 separation device (clean air hood, glove box, separator and microcirculation equipment)
(8) Iso14644-8 molecular pollution
(9) Iso14644-9 clean chemicals (liquid)
Iest series
Clean air:
Rp-cc001 high efficiency and ultra high efficiency filters
Rp-cc002 unidirectional flow device
Rp-cc006 clean room test rp-cc007 ultra high efficiency filter test
Rp-cc008 gas absorption device
Rp-cc016 deposition rate of nonvolatile residual substances in clean room
Rp-cc021 high efficiency and ultra high efficiency filter media test
Rp-cc034 leak detection of high efficiency and ultra high efficiency filters
Clean room and clean environment:
Rp-cc006 clean room test
Rp-cc012 key points of clean room design
Rp-cc016 deposition rate of nonvolatile residual substances in clean room
Rp-cc018 clean room management, operation and testing procedure
Rp-cc022 static electricity in clean room and controlled environment
Rp-cc023 microorganisms in clean room
Rp-cc024 vibration measurement and description of microelectronic equipment
Rp-cc026 clean room operation
Rp-cc027 personnel and behavior in clean room and controlled environment
Rp-cc034 leak detection of high efficiency and ultra high efficiency filters
Special applications:
Rp-cc029 pollution control factors to be considered when using sprayer
Operation guarantee:
Rp-cc003 essentials of clothing system for clean room and controlled environment
Rp-cc004 evaluation of rag materials for clean room and controlled environment
Rp-cc005 gloves and fingertips for clean room and controlled environment
Rp-cc020 clean room documentation and format
Equipment:
Rp-cc002 unidirectional flow device
Rp-cc013 equipment calibration and inspection procedure
Rp-cc015 clean room production equipment and auxiliary equipment
Rp-cc034 leak detection of high efficiency and ultra high efficiency filters
Terminology:
Ccrp-011 definitions and pollution control terms
Literature:
Rp-cc009 overview of standards, guidelines, methods and relevant documents in the field of pollution control